BOSSMEN "Precision Clean Nanoscale Photomask Storage Cabinet" Provide a clean and dry storage space for nano-level photomasks, thereby greatly improving the yield rate and technical competition of wafer manufacturing.
Prevent dust from entering the inner gap of the shipping box The filter inside the shipping box must be permeable enough to bring in sufficient airflow, and it must be durable enough to accept cleaning procedures.
This machine is equipped with a nitrogen purifier.
The user Digital flow meter, pressure regulating valve can adjust the nitrogen flow rate into each individual pod and visually monitor it.
Suitable for EUV POD/ RSP 200 Compared with the traditional pod storage tank, this storage equipment has three breakthrough advantages:
It effectively isolates contaminant, confirms that clean nitrogen is effectively filled into each independent pod. In addition to performing dry-cleaning for the pod, it also stably provides 7-20% relative humidity for each pod, which is in line with the humidity environment of the pod storage standards.
It uses RFID and light sensing technology to monitor the entry and exit of each pod storage box for effective material and personnel management.
Compared with the traditional nitrogen gas tank, it can save more than 90% of the nitrogen flow.
It meets the purpose of cleaning, energy saving and management of the pod by combining with five systems The five quality advantages of this innovative equipment: oxygen supply system, filtration system, monitoring system, warning system and safety mode, which all fully meet the potential needs of storage and management and improve the reliability of storage.
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