Front Opening Universal Pods (FOUP) N2 purging|TEEIA B2B SOLUTION ONLINE

Front Opening Universal Pods (FOUP) N2 purging

Manufacturer：HOERBIGER TAIWAN LTD.

Front Opening Universal Pods (FOUP) N2 purging – Preventing contamination of wafers!

The HOERBIGER N2 Purge – Flow regulator system combines flow sensor, solenoid valve and pressure sensor in one module and keeps a controlled environment within the FOUP. The combination of these 3 components in one module safes time for installation and costs for piping.

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Front Opening Universal Pods (FOUP) N2 purging – Preventing contamination of wafers!

The HOERBIGER N2 Purge – Flow regulator system combines flow sensor, solenoid valve and pressure sensor in one module and keeps a controlled environment within the FOUP. The combination of these 3 components in one module safes time for installation and costs for piping.

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