Special equipment for wafer defect,thickness and 3D information measurement and planning is still under research and development. In the product process parameter test, it is characterized by high availability, high measurement accuracy and stability.
The application of BUENO OPTICS optical technology has been extended to the semiconductor industry. It is integrated and developed with AI defect detection and 3D white light conjugate focus/interference module. Special equipment for wafer defect,thickness and 3D information measurement and planning is still under research and development. In the product process parameter test, it is characterized by high availability, high measurement accuracy and stability.
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