ESD improvement plan

Diamond-like carbon (DLC) has the characteristics of high hardness, low friction coefficient, high density, wear resistance, corrosion resistance,ESD properties, etc., so it is widely used in the semiconductor industry chain.

The ESD technology in the semiconductor industry is mainly hard anodizing and spraying Teflon. In a high-temperature environment, the hard-anodized ESD layer will become unstable due to the high-temperature, and its corrosion resistance and mechanical strength will also be reduced.

The special structure of the DLC coating gives it diamond-like mechanical strength and adjustable surface resistance characteristics, allowing DLC to maintain stability in high-temperature (<300°C) environments to reduce costs, improve yield and reliability, demonstrating DLC of excellent performance.